Manufacturer Model Description Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Number of Positions Number of Robots Position 1 Process Position 1 Tank Material Position 1 Other Features Position 2 Process Position 2 Tank Material Position 2 Other Features Position 3 Process Position 3 Tank Material Position 3 Other Features Position 4 Process Position 4 Tank Material Position 4 Other Features Position 5 Process Position 5 Tank Material Position 5 Other Features Position 6 Process
Position 6 Tank Material Position 6 Other Features Position 7 Process Position 7 Tank Material Position 7 Other Features Position 8 Process Position 8 Tank Material Position 8 Other Features Position 9 Process Position 9 Tank Material Position 9 Other Features Position 10 Process Position 10 Tank Material Position 10 Other Features Position 11 Process Position 11 Tank Material Position 11 Other Features Position 12 Process Position 12 Tank Material Position 12 Other Features Automatic Wafer Transfer Automatic Wafer Transfer Type Controller Type Software Revision Level
Mini-Environment Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight
INVENTORY DATA:Check / UnCheckall inventory data fields
Serial Number Asset Number Equipment Type Account to Credit Site Contact Name Site Contact Phone Site Contact Email Address Site Contact Fax
Site Contact Report Request Status Partner Net Book Value Replacement Value Function Meter Hours Private Information Manual in File
Product Literature in File Posting Management Inventoried by Posting Management Photo-Full Posting Management Description Complete Posting Management Completed by Expiration Date Internal Redeployment Preference Date NOT Redeployable